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| Nanopatterning of silicon nitride membranes | 442 |
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| June 2024 | July 2024 | August 2024 | September 2024 | October 2024 | November 2024 | December 2024 | |
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| Nanopatterning of silicon nitride membranes | 8 | 2 | 2 | 15 | 6 | 7 | 2 |
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| Fulltext_1007314.pdf | 114 |
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