Publikace UTB
Repozitář publikační činnosti UTB
Hiding E-beam exposure fields by deterministic aperiodic 2D patterning
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| dc.title | Hiding E-beam exposure fields by deterministic aperiodic 2D patterning | en |
| dc.contributor.author | Horáček, Miroslav | |
| dc.contributor.author | Knápek, Alexandr | |
| dc.contributor.author | Matějka, Milan | |
| dc.contributor.author | Krátký, Stanislav | |
| dc.contributor.author | Urbánek, Michal | |
| dc.contributor.author | Mika, Filip | |
| dc.contributor.author | Kolařík, Vladimír | |
| dc.relation.ispartof | Recent Trends in Charged Particle Optics and Surface Physics Instrumentation | |
| dc.date.issued | 2018 | |
| dc.citation.spage | 36 | |
| dc.citation.epage | 36 | |
| dc.event.title | 16th International Seminar of the Institute-of-Scientific-Instruments-The-Czech-Academy-of-Sciences | |
| dc.event.location | Brno | |
| utb.event.state-en | Czech republic | |
| utb.event.state-cs | Česká republika | |
| dc.event.sdate | 2018-06-04 | |
| dc.event.edate | 2018-06-08 | |
| dc.type | conferenceObject | |
| dc.language.iso | en | |
| dc.publisher | Czech Academy of Science, Institute of Scientific Instruments | |
| utb.faculty | University Institute | |
| dc.identifier.uri | http://hdl.handle.net/10563/1008429 | |
| utb.identifier.obdid | 43879316 | |
| utb.identifier.wok | 000450591400012 | |
| utb.source | d-wok | |
| dc.date.accessioned | 2019-01-31T08:59:01Z | |
| dc.date.available | 2019-01-31T08:59:01Z | |
| utb.ou | Centre of Polymer Systems | |
| utb.contributor.internalauthor | Urbánek, Michal | |
| utb.fulltext.affiliation | M. Horáček 1, A. Knápek 1, V. Tryhuk 2, M. Matějka 1, S. Krátký 1, M. Urbánek 3, F. Mika 1, V. Kolařík 1* 1 Institute of Scientific Instruments CAS, Královopolská 147, 612 64 Brno, Czech Republic 2 Brno Technical University, Fac. of Civil Engineering, Institute of Mathematics and Descriptive Geometry, Žižkova 17, 602 00 Brno, CZ 3 Tomas Bata University, Centre of Polymer Systems, tř. Tomáše Bati 5678, 760 01 Zlín, CZ * e-mail: [email protected] | |
| utb.fulltext.dates | - | |
| utb.wos.affiliation | [Horacek, M.; Knapek, A.; Matejka, M.; Kratky, S.; Mika, F.; Kolarik, V.] Inst Sci Instruments CAS, Kralovopolska 147, Brno 61264, Czech Republic; [Urbanek, M.] Tomas Bata Univ, Ctr Polymer Syst, Tr Tomase Bati 5678, Zlin 76001, Czech Republic | |
| utb.fulltext.faculty | University Institute | |
| utb.fulltext.ou | Centre of Polymer Systems |
